(Senior) Principal Engineer, Heaters and Electrostatic Chuck (ESC)

Job description

Step into a career with ASM, where cutting edge technology meets collaborative culture. ​ For over 55 years ASM has been ahead of what’s next, at the forefront of innovation and what’s technologically possible. With more than 4,500 ASMers representing 70 nationalities, our people and our advanced semiconductor devices are playing a crucial role in trends such as 5G, cloud computing, AI, and autonomous driving. But we’re more than just a tech company. We value diversity, inclusion and sustainability as we strive to make a positive impact on the world. Our development programs help support your growth, shaping your future and pushing the boundaries of innovation to unleash potential. The (Senior) Principal Engineer for Heaters and Electrostatic Chuck (ESC) is accountable for the design, and delivery of hardware engineering solutions focused on ESC and heaters technology. This role is responsible for focusing on the development of highly innovative technologies over legacy solutions. Key Responsibilities Design and develop Johnsen-Rahbek (JR) and Coulombic-type ESC assemblies for 300mm wafer processing applications. Select and qualify dielectric materials (alumina, AlN , Y2O3) for ESC ceramic layers based on electrical, thermal, and chemical compatibility requirements. Define ESC clamping voltage, leakage current, and chucking / dechucking performance specifications. <li data-leveltext="